JPS644141B2 - - Google Patents
Info
- Publication number
- JPS644141B2 JPS644141B2 JP2268082A JP2268082A JPS644141B2 JP S644141 B2 JPS644141 B2 JP S644141B2 JP 2268082 A JP2268082 A JP 2268082A JP 2268082 A JP2268082 A JP 2268082A JP S644141 B2 JPS644141 B2 JP S644141B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- amount
- mounting table
- standard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 28
- 238000009826 distribution Methods 0.000 claims description 18
- 238000011156 evaluation Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 11
- 239000010408 film Substances 0.000 description 10
- 238000007740 vapor deposition Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57022680A JPS58140609A (ja) | 1982-02-17 | 1982-02-17 | 表面状態評価装置 |
| US06/404,899 US4583861A (en) | 1981-08-12 | 1982-08-03 | Surface condition judging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57022680A JPS58140609A (ja) | 1982-02-17 | 1982-02-17 | 表面状態評価装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58140609A JPS58140609A (ja) | 1983-08-20 |
| JPS644141B2 true JPS644141B2 (en]) | 1989-01-24 |
Family
ID=12089570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57022680A Granted JPS58140609A (ja) | 1981-08-12 | 1982-02-17 | 表面状態評価装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58140609A (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61270642A (ja) * | 1985-05-25 | 1986-11-29 | Japan Spectroscopic Co | 拡散反射オ−トサンプラ− |
| DE3526553A1 (de) * | 1985-07-25 | 1987-01-29 | Zeiss Carl Fa | Remissionsmessgeraet zur beruehrungslosen messung |
| ES2235608B1 (es) * | 2003-07-15 | 2006-11-01 | Consejo Sup. De Invest. Cientificas | Metodo optico y dispositivo para la cuantificacion de la textura en celulas fotovoltaicas. |
| GB201312913D0 (en) | 2013-07-18 | 2013-09-04 | Perkinelmer Ltd | Sample spinners and spectrometers including sample spinners |
-
1982
- 1982-02-17 JP JP57022680A patent/JPS58140609A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58140609A (ja) | 1983-08-20 |
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